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LD-601 Series - Wafer Edge Detection Sensors

LD-601 Series - Wafer Edge Detection Sensors
  • Laser based micrometer for semiconductor wafer edge detection

The LD series of laser edge detection sensors offers high-accuracy measurement using a red semiconductor laser and CCD receiver combination. Both are mounted to the same body ensuring accurate alignment out of the box. The laser element is available in either a class 1 or 2 type. Stable sensing over a long period of time has been achieved by integrating a shade correction function that compensates for any receiver sensitivity variation and generates a uniform sensitivity distribution. Four sensing methods are available including edge and width measurements in either light or dark mode.

LD Series Brochure
LD-600 Instruction Manual

LD-601 Instruction Manual
LD-C60 Instruction Manual 

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